Precision Timing Technologies: MEMS, Quartz & Atomic Solutions  

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Why Choose Quartz Substrates?

  • Optical clarity (UV–NIR transmission for fused quartz)
  • Thermal stability with low CTE and good shock resistance
  • Electrical insulation and high dielectric strength
  • Piezoelectric cuts (single-crystal) for RF/SAW/BAW
  • R&D-friendly lead times and documented specs

Grades

  • Fused Quartz (amorphous SiO₂) — optical grade, low bubble/inclusion
  • Single-Crystal Quartz — X/Y/AT cuts; orientation for timing/RF

Surface & Finish

  • SSP (single-side polished), DSP (double-side polished)
  • Lapped surfaces for follow-on processing
  • Flatness/roughness per request; optical-quality available

Sizes & Thickness

  • Rounds: 2″, 3″, 4″ (others custom)
  • Rectangles/squares and custom shapes with flats/notches
  • Thickness: ~0.2–2.0 mm standard (tighter control on request)

Applications

  • Optics & photonics windows, masks, spectroscopy cells
  • RF & timing (SAW/BAW resonators, oscillators)
  • MEMS/sensors requiring low loss and clean substrates
  • High-temperature fixtures and thermal cycling tests

Metrology & Docs

  • Thickness & flatness reports on request
  • Surface inspection / microscope images available
  • Material certifications (grade/spec) when applicable

Get high-quality fused quartz and single-crystal quartz substrates with optical, thermal, and dielectric precision. Polished or lapped surfaces available.

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Quartz Substrates (Fused Quartz & Single-Crystal Quartz)

UniversityWafer supplies quartz substrates for optics, RF, MEMS, and high-temperature research. Choose from fused quartz (amorphous SiO₂) for broad optical transmission and thermal stability, or single-crystal quartz for piezoelectric and RF applications (SAW/BAW/oscillators).

Quartz substrates — fused quartz wafer and single-crystal quartz rectangles under cleanroom lighting
Fused quartz and single-crystal quartz substrates for optics, RF, and MEMS.

Grades & Surface Finishes

  • Fused quartz (amorphous SiO₂): optical-grade, low bubble/inclusion levels
  • Single-crystal quartz: X-cut, Y-cut, AT-cut (others on request)
  • Finishes: SSP, DSP (optical-quality); lapped for follow-on processing

Typical Sizes & Thickness

  • Rounds: 2″, 3″, 4″; Rectangles and custom shapes available
  • Thickness: ~0.2–2.0 mm standard (tighter control on request)
  • Edge options: beveled/chamfered; custom flats and notches

Key Properties

  • Optical: high transmission (UV–NIR for fused quartz), low birefringence (single-crystal is cut-dependent)
  • Thermal: low CTE, excellent thermal shock resistance (fused quartz)
  • Electrical: high resistivity and dielectric strength; piezoelectric response (single-crystal)
  • Surface quality: optical-grade roughness and flatness available

Applications

  • Optics: windows, masks, photonics, spectroscopy
  • RF/Timing: SAW/BAW filters, resonators, oscillators (single-crystal cuts)
  • MEMS and sensors requiring low loss and clean, stable substrates
  • High-temperature processing and test fixtures

Documentation & Metrology

  • Thickness and flatness reports (as requested)
  • Surface inspection and microscope images on request
  • Material certifications (grade/spec) provided when applicable

Lead Times

Popular sizes are stocked or sourced quickly. Custom cuts and optical-grade polishing may add lead time. Share your size, thickness, finish, and quantity for a fast quote.

Material Specifications

  • Density: 2.20 g/cm³ (fused quartz), 2.65 g/cm³ (single-crystal)
  • Refractive Index: ~1.46 at 589 nm (fused quartz)
  • Thermal Expansion Coefficient: 0.5 × 10⁻⁶ /°C (fused quartz)
  • Melting Point: ~1710 °C
  • Dielectric Constant: 3.8 (fused quartz), ~4.5 (single-crystal)
  • Hardness: Mohs ~7

Performance in Research & Industry

  • Photonics & Optics: low absorption and scattering from UV to IR regions
  • Semiconductor Processing: chemical and plasma resistant; ideal for RIE and CVD chambers
  • Timing Devices: AT-cut and SC-cut quartz for high-stability oscillators
  • MEMS & Sensors: compatible with lithography, wet etch, and metallization processes

Polishing & Customization

  • Surface Quality: 10-5 scratch-dig available for optical components
  • Parallelism: < 5 arc sec optional for precision optical paths
  • Edge Preparation: chamfered or fire-polished for clean handling
  • Laser Marking: optional part numbers or alignment markers

Thermal and Optical Behavior

Fused quartz maintains exceptional thermal shock resistance, making it suitable for high-temperature environments. Its optical transparency extends from ~200 nm (UV) up to ~3.5 µm (IR), enabling its use in spectroscopy and MEMS optical actuator applications.

Request Engineering Assistance

UniversityWafer’s engineers can recommend substrate specifications based on your wavelength, processing environment, and device requirements. Send your dimensions, orientation, and surface specs for a detailed quote.

Related pages: Single-Crystal QuartzFused Quartz / Fused SilicaBK7Borofloat 33D263